Method for manufacturing tape wiring board

ABSTRACT

A method for manufacturing a tape wiring board in accordance with the present invention may employ an imprinting process in forming a wiring pattern, thereby reducing the number of processes for manufacturing a tape wiring board and allowing the manufacturing process to proceed in a single production line. Therefore, the manufacturing time and cost may be reduced. A profile of the wiring pattern may be determined by the shape of an impression pattern of a mold. This may establish the top width of inner and outer leads and incorporate fine pad pitch. Although ILB and OLB process may use an NCP, connection reliability may be established due to the soft and elastic wiring pattern.

CROSS REFERENCE TO RELATED APPLICATIONS

This U.S. non-provisional application claims priority under 35 U.S.C. §119 of Korean Patent Application No. 2004-50204, filed on Jun. 30, 2004,the entire contents of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a method for manufacturing a tapewiring board for a semiconductor package and, more particularly, to amethod for manufacturing a tape wiring board, by imprinting a conductivepolymer and forming a wiring pattern.

2. Description of the Related Art

Tape automated bonding (TAB) techniques may employ inner lead bonding(ILB) for inner connections. TAB techniques also may provide areel-to-reel package assembly using a reel type tape wiring board. Apackage manufactured by the TAB technique is referred to as a TABpackage. The TAB package may include a tape carrier package (TCP) and achip on flex (COF). The TAB package may be thin and have fine pitch. ATAB package may be used in a wide range of applications, examplesinclude in a watch, a calculator, a driver for a liquid crystal displayand a micro-processor for a personal computer.

The tape wiring board also may be used for a semiconductor package suchas a micro-BGA (μBGA) package and a chip on board (COB) package.

FIG. 1 is a cross-sectional view of a conventional tape wiring board 10.Referring to FIG. 1, a tape wiring board 10 may include a base film 11and a wiring pattern 12 formed on the base film 11. A solder resistlayer 19 may protect the wiring pattern 12, and may only partially coverit, exposing some of the wiring pattern 12 to connect with asemiconductor chip or an external terminal. The base film 11 may includea thermosetting polyimide tape. The wiring pattern 12 may include awiring layer of Cu. The wiring pattern 12 may include an under barriermetallurgy (UBM) layer 13 formed on the base film 11, a wiring line 14of Cu formed on the UBM layer 13, and a plating layer 15 of Snsurrounding the wiring line 14.

FIG. 2 is a flow chart of a conventional method 20 for manufacturing atape wiring board 10.

Referring to FIG. 2, a base film 11 may be provided (21) and may includea thermosetting polyimide tape. The base film 11 may be formed from apolyamic acid solution by drum casting, drying and curing processes. Anannealing process may improve the dimensional stability of the base film11.

A UBM layer 13 may be formed (22), for example, on one surface of thebase film 11. The UBM layer 13 may be made of materials that can adhereto the base film 11 and have metallic bondability with a Cu layer. Forexample, the UBM layer 13 may be formed using (Cr+Cu)/Ni by a sputteringmethod.

A Cu layer may be formed (23) on the UBM layer 13 at a predeterminedthickness using the UBM layer 13 as a plating electrode.

The Cu layer may be patterned to form a Cu wiring line 14 (24) forexample by a photolithographic process.

Specifically, an anticorrosive layer and an oxidation layer formed onthe Cu layer may be removed by a soft etching process. The Cu layer maybe etched to a thickness suitable for forming the Cu wiring line 14.

A photosensitive film may be applied to the Cu wiring layer. A portionof the photosensitive film may be removed through exposure anddevelopment processes. A portion of the Cu layer may be removed by anetching process, leaving a portion of the Cu layer to be a wiring line.The remaining Cu layer may be removed as well as the remainingphotosensitive film.

A Sn plating layer 15 may be formed (25) and may surround the Cu wiringline 14. A Sn plating layer 15 may prevent oxidization of the Cu wiringline 14 and improve the bondability of the Cu wiring line 14 with anexternal terminal. Thus, formation of a wiring pattern 12 may becompleted.

A solder resist layer 19 may be formed (26), for example by printing asolder resist. A solder resist layer 19 may protect the wiring pattern12. The solder resist layer 19 may exclude a portion of the wiringpattern 12 to connect with inner and outer terminals.

The conventional method for manufacturing a tape wiring board maycomprise providing a base film, forming a Cu layer, and patterning a Culayer. These processes may even be performed in separate productionlines.

Formation of a wiring pattern with Cu and a photolithographic may bequite complicated. The photolithographic may include a number ofindividual processes, which in turn may increase manufacturing time andcost.

SUMMARY OF THE INVENTION

An embodiment of the present invention is directed to a method formanufacturing a tape wiring board which may reduce the number ofmanufacturing processes.

An embodiment of the present invention is directed to a method formanufacturing a tape wiring board which may proceed in a singleproduction line.

An embodiment of the present invention is directed to a method formanufacturing a tape wiring board which may reduce the manufacturingcost.

In one embodiment, a method for manufacturing a tape wiring boardincludes forming a conductive polymer layer on a base film; imprintingthe conductive polymer layer by a mold to form a wiring pattern; andforming a solder resist layer to cover the wiring pattern.

BRIEF DESCRIPTION OF THE DRAWINGS

Exemplary embodiments of the present invention will be readilyunderstood with reference to the following detailed description inconjunction with the accompanying drawings, wherein like referencenumerals designate like structural elements, and in which:

FIG. 1 is a cross-sectional view of a conventional tape wiring board;

FIG. 2 is a flow chart of a conventional method for manufacturing a tapewiring board;

FIG. 3 is a flow chart of a method for manufacturing a tape wiring boardusing a conductive polymer in accordance with an embodiment of thepresent invention;

FIGS. 4 through 8 are views of aspects of the method of FIG. 3;

FIG. 4 is a cross-sectional view of a base film;

FIG. 5 is a cross-sectional view of forming a conductive polymer layeron a base film;

FIG. 6A is a cross-sectional view of imprinting a conductive polymerlayer using a mold;

FIG. 6B is a cross-sectional view of forming a wiring pattern;

FIG. 7 is a cross-sectional view of removing residue;

FIG. 8 is a cross-sectional view of forming a solder resist layer;

FIG. 9 is a flow chart of a method for manufacturing a tape wiring boardusing a conductive polymer in accordance with an embodiment of thepresent invention;

FIGS. 10 through 13 are views of aspects of the method of FIG. 9;

FIG. 10 is a cross-sectional view of providing a base film having apolyimide film and thermoplastic polymer layers;

FIG. 11A is a cross-sectional view of imprinting a thermoplastic polymerlayer using a mold;

FIG. 11B is a cross-sectional view of forming a convex wiring pattern;

FIG. 12A is a cross-sectional view of forming a protection layer on aconcave portion;

FIG. 12B is a cross-sectional view of forming a conductive polymer layeron a wiring pattern area;

FIG. 12C is a cross-sectional view of removing residue on a concaveportion;

FIG. 13 is a cross-sectional view of forming a solder resist layer;

FIG. 14 is a flow chart of a method for manufacturing a tape wiringboard using a conductive polymer in accordance with an embodiment of thepresent invention;

FIGS. 15 through 19 are views of aspects of the method of FIG. 14;

FIG. 15 is a cross-sectional view of forming a concave wiring pattern;

FIG. 16 is a cross-sectional view of forming a mask layer;

FIG. 17 is a cross-sectional view of forming a conductive polymer layeron a wiring pattern area;

FIG. 18 is a cross-sectional view of removing a mask layer; and

FIG. 19 is a cross-sectional view of forming a solder resist layer.

These drawings are provided for illustrative purposes only and are notdrawn to scale. The spatial relationships and relative sizing of theelements illustrated in the various embodiments may have been reduced,expanded or rearranged to improve the clarity of the figure with respectto the corresponding description. The figures, therefore, should not beinterpreted as accurately reflecting the relative sizing or positioningof the corresponding structural elements that could be encompassed by anactual device manufactured according to the exemplary embodiments of theinvention.

DETAILED DESCRIPTION OF SOME EXEMPLARY EMBODIMENTS

Embodiments of the present invention are described more fully withreference to the accompanying drawings. This invention may be embodiedin many different forms and should not be construed as limited to theparticular embodiments set forth herein. Rather, these embodiments areprovided for purposes of illustration.

In the description, well-known structures and processes have not beendescribed or illustrated in detail in order to avoid obscuring thepresent invention. It will be appreciated that for simplicity andclarity of illustration, some elements illustrated in the figures havenot necessarily been drawn to scale. For example, the dimensions of someof the elements have been exaggerated or reduced relative to otherelements for clarity.

First Embodiment

FIG. 3 is a flow chart of a method 30 for manufacturing a tape wiringboard using a conductive polymer in accordance with an embodiment of thepresent invention. FIGS. 4 through 8 are views of aspects of the method30 of FIG. 3.

Referring to FIG. 4, the method 30 may start with providing a base film41 (31 of FIG. 3). The base film 41 may include a thermosettingpolyimide tape. The base film 41 may be formed from a polyamic acidsolution by drum casting, drying and curing processes. An annealingprocess may be performed to improve the dimensional stability of thebase film 41.

Referring to FIG. 5, a conductive polymer layer 43 may be formed (32 ofFIG. 3). A conductive polymer may coat a surface of the base film 41 ata predetermined thickness to form the conductive polymer layer 43. Thethickness of the conductive polymer layer 43 may even be greater thanthe depth of an impression pattern of a mold.

An example conductive polymer may include a mixture of a thermoplasticpolymer and conductive nano-particles. An example thermoplastic polymermay be a liquid polymer, with a viscosity which may reduce significantlyat the melting point or higher and which may melt between about 250° C.and about 320° C. The conductive nano-particles may include nanosilver,carbon nanotube (CNT), carbon nanofiber (CNF) or combinations thereof.An example size of the conductive nano-particles may be about 0.2 μm oreven less.

A protection layer 46 may be formed on the conductive polymer layer 43.The protection layer 46 may prevent the conductive polymer layer 43 fromadhering to a mold during an imprinting process. Silane or siliconepolymer solution may be sprayed on the conductive polymer layer 43 andbe dried to form the protection layer 46.

Referring to FIGS. 6A and 6B, a wiring pattern 42 may be formed (33 ofFIG. 3). A mold 91 may have an impression pattern 92 at the bottomsurface thereof. The impression pattern 92 may be engraved correspondingto the wiring pattern. After imprinting, the conductive polymer layer 43may be formed on surface features such as on a concave portion 45 or aconvex portion. This embodiment may use the convex portion as the wiringpattern 42.

Specifically, the conductive polymer layer 43 may be heated by anyheating means, such as an infrared lamp. An example heating temperaturemay be higher than the melting point of the conductive polymer and lowerthan the glass transition temperature (Tg) of the base film 41. Atypical Tg of the base film 41 may be approximately 350° C.

The conductive polymer layer 43 may be impressed by the mold 91. Theimpression pattern 92 of the mold 91 may be imprinted on the conductivepolymer layer 43. The wiring pattern 42 may be formed on the conductivepolymer layer 43. During an imprinting process, the mold 91 may becooled continuously. In order to remove residue easily, the mold 91 mayimpress the conductive polymer layer 43 close to one surface of the basefilm 41.

The mold 91 may have at least one impression pattern 92 formanufacturing at least one semiconductor package. The mold 91 mayprovide wiring patterns 42 simultaneously, for example to a plurality ofsemiconductor packages, thereby improving productivity. The impressionpatterns 92 may be arranged in a matrix, for example layouts of 2×5 and4×3 patterns.

Referring to FIG. 7, residue may be removed (34 of FIG. 3). Theconductive polymer layer 43 of a concave portion (45 of FIG. 6B) may beremoved, for example by a dry etching method. If the wiring pattern 42has the protection layer (46 of FIG. 6B) formed thereon, the protectionlayer may be removed, for example by a plasma cleaning process.

Referring to FIG. 8, a solder resist layer 49 may be formed (35 of FIG.3). A solder resist may be printed on the wiring pattern 42 to form thesolder resist layer 49. The solder resist layer 49 may exclude a portionof the wiring pattern 42 to be connected with an external terminal.Thus, a tape wiring board 40 may be completed.

A profile of the wiring pattern 42 of this embodiment may be determinedby the shape of the mold 91. This may establish the top width of innerand outer leads and incorporate fine pad pitch.

When a tape carrier package is manufactured by a TAB process using anembodiment tape wiring board 40, a semiconductor chip may be mounted onthe tape wiring board 40 by an inner lead bonding (ILB) process, and theTAB package may be connected with an external device by an outer leadbonding (OLB) process.

The ILB process may include a low temperature bonding process, forexample a non-conductive paste (NCP) process in consideration of theheat resistance of the wiring pattern 42 of conductive polymer. Thecuring temperature of NCP may not exceed the melting point of conductivepolymer, for example, the curing temperature may be maintained atapproximately 240° C., or less. Although the ILB process uses the NCP,connection reliability may be established due to the soft and elasticwiring pattern 42.

The OLB process may include a non-conductive film (NCF) bonding process.Although the OLB process uses the NCF, connection reliability may beestablished due to the soft and elastic wiring pattern 42. The OLBprocess may include a conventional anisotropic conductive film (ACF)bonding process.

Second Embodiment

Although the first embodiment shows a wiring pattern may be formed byimprinting a conductive polymer layer formed on a base film, the wiringpattern may be formed by imprinting a thermoplastic polymer layer formedon a base film and forming a conductive polymer layer on a wiringpattern area. The wiring pattern area may be formed on surface featuressuch as concave or convex portions. A second embodiment shows a convexwiring pattern area and a third embodiment shows a concave wiringpattern area.

FIG. 9 is a flow chart of a method 50 for manufacturing a tape wiringboard using a conductive polymer in accordance with a second embodimentof the present invention. FIGS. 10 through 13 are views of each aspectof the method 50 of FIG. 9.

Referring to FIG. 10, the method 50 of the second embodiment may startwith providing a base film 61 (51 of FIG. 9). An example base film 61may have a thermosetting polyimide tape 61 a and thermoplastic polymerlayers 61 b formed on both sides of the thermosetting polyimide tape 61a. The polyimide tape 61 a may be formed from a polyamic acid solutionby drum casting, drying and curing processes. An example thermoplasticpolymer layer 61 b may comprise thermoplastic polyimide and be formed bycasting, drying and curing processes. Thus a three-layered base film 61may be completed. Alternatively, a three-layered base film 61 may becreated by co-extruding, drying and curing the thermosetting polyimidetape 61 a and the thermoplastic polymer 61 b. An annealing process maybe performed to improve the dimensional stability of the base film 61.The polyimide tape 61 a and thermoplastic polymer layer 61 b may benon-conductive.

A first protection layer 61 c may be formed, for example, by sprayingand drying silane or silicone polymer solution on the thermoplasticpolymer layer 61 b. A first protection layer 61 c may prevent thethermoplastic polymer layer 61 b from adhering to a mold 93 during animprinting process.

Referring to FIGS. 11A and 11B, a convex wiring pattern area 64 may beformed (52 of FIG. 9), for example by impressing the thermoplasticpolymer layer 61 b with a mold 93. The wiring pattern area 64 may beformed on the thermoplastic polymer layer 61 b. This imprinting methodmay provide a surface feature, for example concave or convex portions,on the thermoplastic polymer layer 61 b. The second embodiment may usethe convex portion as the wiring pattern area 64. The mold 93 may havean impression pattern 94 at the bottom surface thereof. The impressionpattern 94 may correspond to the wiring pattern.

A plasma cleaning process may be used to remove the first protectionlayer (61 c of FIG. 11A) and impurities from the thermoplastic polymerlayer 61 b.

Referring to FIGS. 12A through 12C, a wiring pattern 62 may be formed(53 of FIG. 9).

As shown in FIG. 12A, a second protection layer 65 may be formed, forexample by spraying a silane or silicone polymer solution on thethermoplastic polymer layer 61 b and be dried. The second protectionlayer 65 may be formed in the concave portion at a predetermined height,for example, by using a specific quantity of silane or silicone polymersolution. The second protection layer 65 on the wiring pattern area 64may be removed by peeling or etching process so that a conductivepolymer layer can be formed on the wiring pattern area 64.

Referring to FIG. 12B, a conductive polymer layer may be formed on thewiring pattern area 64 using a conductive polymer, thus forming a wiringpattern 62. Example methods to form the wiring pattern 62 includetransfer, dipping or coating methods. The wiring patterns 62 may bebetween 3 μm and 4 μm.

In some instances, a portion of the conductive polymer 66 may remain onthe concave portion 63. A remaining portion of the conductive polymer 66can cause electrical short due to connection with the conductive polymerlayer of an adjacent wiring pattern area 64. Therefore, the conductivepolymer 66 of the concave portions 63 may be removed. For effectiveremoval of the conductive polymer 66 of the concave portion 63, thesecond protection layer 65 of the concave portion 63 may be removedtogether with the conductive polymer 66 by a plasma cleaning process.

Example conductive polymers may include a conductive polymer solution ora paste having conductive nano-particles.

Referring to FIG. 12C, the wiring pattern 64 may be completed. Theconductive polymer layer may be formed on the wiring pattern area 64.

Referring to FIG. 13, a solder resist layer 69 may be formed (54 of FIG.9). The solder resist layer 69 may cover the wiring pattern 62 and mayexclude a portion of the wiring pattern 62 to be connected with innerand outer terminals. Thus, a tape wiring board 60 may be completed.

Third Embodiment

FIG. 14 is a flow chart of a method 70 for manufacturing a tape wiringboard using a conductive polymer in accordance with a third embodimentof the present invention. FIGS. 15 through 19 are views of each aspectof the method 70 of FIG. 14.

The third embodiment may have a similar process to the secondembodiment. For example, an embodiment may include providing a base film81 having a polyimide tape 81 a with thermoplastic polymer layers 81 bformed on both sides of the polyimide tape 81 a (71 of FIG. 14) andimprinting the thermoplastic polymer layer 81 b (72 of FIG. 14).However, some embodiments may use a mold having an impression pattern ofa different structure from that of the second embodiment.

Referring to FIG. 15, a concave wiring pattern area 83 may be formed (72of FIG. 14). The thermoplastic polymer layer 81 b may be impressed by amold (not shown). The wiring pattern area 83 may be formed on thethermoplastic polymer layer 81 b. This imprinting method may provide asurface feature, for example on concave or convex portions 84, on thethermoplastic polymer layer 81 b. This embodiment may use the concaveportion as the wiring pattern area 83. The mold may have an impressionpattern. The impression pattern may correspond to the wiring pattern.

A plasma cleaning process may remove a protection layer (not shown) andimpurities from the thermoplastic polymer layer 81 b.

Referring to FIG. 16, a mask layer 85 may be formed (73 of FIG. 14).Silane or silicone polymer solution may be coated on the convex portion84 to form the mask layer 85. The mask layer 85 may help fill aconductive polymer into the concave portion. The mask layer 85 may beformed by a roll coating method.

Referring to FIG. 17, a wiring pattern 82 may be formed (74 of FIG. 14).A conductive polymer may be filled into the wiring pattern area 83 andbe cured to form the wiring pattern 82. An example conductive polymerincludes a conductive paste containing conductive nano-particles and amixture of a liquid thermosetting resin, such as epoxy and conductivenano-particles. An example height of the wiring pattern 82 from theupper surface of the thermoplastic polymer layer 81 b may beapproximately 5 μm.

Referring to FIG. 18, the mask layer (85 of FIG. 17) may be removed (75of FIG. 14), for example by a dry or wet etching process. A conductivepolymer that may remain on the mask layer may also be removed.

Referring to FIG. 19, a solder resist layer 89 may be formed (76 of FIG.14). The solder resist layer 89 may cover the wiring pattern 82. Thesolder resist layer 89 may exclude a portion of the wiring pattern 82 toconnect with inner and outer terminals. Thus, a tape wiring board 80 maybe completed.

Accordingly, a method for manufacturing a tape wiring board inaccordance with the present invention may employ an imprinting processin forming a wiring pattern, thereby reducing the number of processesfor manufacturing a tape wiring board and allowing the manufacturingprocess to proceed in a single production line. Therefore, themanufacturing time and cost may be reduced.

A profile of the wiring pattern may be determined by the shape of animpression pattern of a mold. This may establish the top width of innerand outer leads and incorporate a fine pad pitch.

Although ILB and OLB processes may use an NCP, connection reliabilitymay be established due to the soft and elastic wiring pattern.

Although some embodiments of the present invention have been describedin detail hereinabove, it should be understood that many variationsand/or modifications of the basic inventive concepts herein taught,which may appear to those skilled in the art, will still fall within thespirit and scope of embodiments of the present invention as defined inthe appended claims.

1. A method for manufacturing a tape wiring board, the methodcomprising: forming a conductive polymer layer on a base film;imprinting the conductive polymer layer by a mold to form a wiringpattern; and forming a solder resist layer to cover the wiring pattern.2. The method of claim 1, further comprising removing residue beforecovering the wiring pattern.
 3. The method of claim 1, furthercomprising exposing a portion of the wiring pattern to be connected withinner and outer terminals.
 4. The method of claim 1, wherein the basefilm includes a thermosetting polyimide tape.
 5. The method of claim 1,wherein the conductive polymer layer includes a mixture of athermoplastic polymer and conductive particles.
 6. The method of claim5, wherein the conductive particle is selected from the group consistingof a nanosilver, a carbon nanotube, a carbon nanofiber and combinationsthereof.
 7. The method of claim 1, wherein forming a conductive polymerlayer includes: forming a conductive polymer to a greater thickness thanthe depth of an impression pattern of the mold; and spraying and curingat least one of silane and silicone polymer solution on the conductivepolymer layer to form a protection layer.
 8. The method of claim 1,wherein imprinting a conductive polymer layer includes: heating theconductive polymer layer at a temperature higher than the melting pointof the conductive polymer and lower than the glass transitiontemperature (Tg) of the base film; and impressing the conductive polymerlayer by the mold to imprint the impression pattern on the conductivepolymer layer.
 9. The method of claim 8, wherein imprinting theconductive polymer layer includes cooling the mold continuously.
 10. Themethod of claim 8, wherein imprinting the conductive polymer layerincludes impressing the conductive polymer layer by the mold close toone surface of the base film.
 11. The method of claim 10, wherein thewiring pattern includes a convex portion of the conductive polymerlayer.
 12. The method of claim 2, wherein removing residue includesremoving a concave portion of the conductive polymer layer by a dryetching method.
 13. The method of claim 12, wherein removing residueincludes removing the protection layer formed on the conductive polymerlayer.
 14. A method for manufacturing a tape wiring board, the methodcomprising: providing a base film, the base film having a thermosettingpolyimide tape and at least one thermoplastic polymer layer formed on atleast one side of the thermosetting polyimide tape; impressing the atleast one thermoplastic polymer layer by a mold having an impressionpattern formed at the bottom surface to form a wiring pattern area, theimpression pattern corresponding to a wiring pattern; and forming aconductive polymer layer on the wiring pattern area to form the wiringpattern.
 15. The method of claim 14, further comprising forming a solderresist layer on the wiring pattern.
 16. The method of claim 15, furthercomprising exposing a portion of the wiring pattern to be connected withinner and outer terminals.
 17. The method of claim 14, wherein providinga base film includes spraying and curing at least one of silane andsilicone polymer solution on the thermoplastic polymer layer to form afirst protection layer.
 18. The method of claim 17, wherein the wiringpattern area includes a convex portion of the thermoplastic polymerlayer.
 19. The method of claim 18, wherein forming a wiring pattern areaincludes removing the first protection layer formed on the thermoplasticpolymer layer.
 20. The method of claim 19, wherein forming a wiringpattern includes forming a conductive polymer layer on the wiringpattern area.
 21. The method of claim 20, wherein forming a wiringpattern includes: spraying and drying a silicone polymer solution on thethermoplastic polymer layer to form a second protection layer; removingthe second protection layer formed on the wiring pattern area; forming aconductive polymer layer on the wiring pattern area to form a wiringpattern; and removing the conductive polymer and the second protectionlayer of the concave portion.
 22. The method of claim 20, whereinforming a conductive polymer layer is selected from the group consistingof a transfer, dipping or coating method.
 23. The method of claim 20,wherein the thickness of the conductive polymer layer is between about 3μm and about 4 μm.
 24. The method of claim 17, wherein the conductivepolymer includes a conductive polymer solution or a paste havingconductive nano-particles.
 25. The method of claim 17, wherein thewiring pattern area includes a concave portion of the thermoplasticpolymer layer.
 26. The method of claim 25, wherein forming a wiringpattern area includes removing the protection layer formed on thethermoplastic polymer layer.
 27. The method of claim 26, wherein forminga wiring pattern includes: coating at least one of silane and siliconepolymer solution on the convex portion to form a mask layer; placing aliquid conductive polymer into the wiring pattern area and curing theliquid conductive polymer to form a wiring pattern; and removing themask layer.
 28. The method of claim 27, wherein the height of the wiringpattern from the upper surface of the thermoplastic polymer layer isapproximately about 5 μm.
 29. The method of claim 27, wherein theconductive polymer includes at least one of a conductive polymersolution and a paste having conductive nano-particles.